Pre-Requisite : EC307 and EC405
Contact Hours and Credits : ( 3 -0- 0 ) 3
To impart knowledge on basics of MEMS and their applications in RF circuit design.
Introduction to Micho machining Processes. RF MEMS relays and switches. Switch parameters. Actuation mechanisms. Bistable relays and micro actuators. Dynamics of switching operation.
MEMS inductors and capacitors. Micro machined inductor. Effect of inductor layout. Modeling and design issues of planar inductor. Gap-tuning and area-tuning capacitors. Dielectric tunable capacitors.
MEMS phase shifters. Types. Limitations. Switched delay lines. Fundamentals of RF MEMS Filters.
Micro machined transmission lines. Coplanar lines. Micro machined directional coupler and mixer.
Micro machined antennas. Micro strip antennas – design parameters. Micromachining to improve performance. Reconfigurable antennas.