MEMS Design Centre

Associated Prof.: Dr. M. Umapathy, Dr. G. Uma and Dr. B. Vasuki

 

MEMS Lab  MEMS Lab  MEMS Lab

 

MEMS design lab was established in the year 2003, when the department was a part of two national programs National Programme on Smart Materials (NPSM) and National Programme on Micro and Smart Materials and Systems (NPMASS) of Government of India, initiated for developing research in MEMS and smart materials. As few faculty of the department was working on smart materials based instrumentation system development and control, developing simulations and characterization facility for MEMS devices fabricated with smart materials was a good starting point. The objective of the lab is to carry out design and simulation of microdevices  and fabrication  in commercial FabLABS through Centre for Nano Science and Engineering (CeNSE) at Indian Institute of Science(IISc). The research faculty and students associated with this lab have extended their horizon and carried out research in the following areas, by adding the required facilities:

  • Design and development of micro and meso scale resonant sensors
  • Energy harvesting
  • Design of transducers using fractional order arithmetic
  • Measurement of the quality of Diesel Exhaust Fuel(DEF) and its controls
  • Physiological variable measurement and prediction

 

Current and Completed R&D and Consultancy Projects:

1. Dr. M. Umapathy - Sponsored Projects and Consultancy

2. Dr. G. Uma - Sponsored Projects and Consultancy 

3. Dr. B. Vasuki - Sponsored Projects and Consultancy

List of Facilities available:

Caliber core i9  workstation                                                           Blood Glucose level estimation using Renesas OB1203 module

               

    

Energy harvester setup sourcing Digital thermohygrometer

Energy harvester setup sourcing IoT based Tire pressure monitoring system

Fractional Order Resonant Inductive Transducer

Fault identification using Kalman Filter for RTD Interface using Resistance-to-Voltage conversion

Split mass Coriolis flowmeter                                   Piezoelectric rotational energy harvester

  

Olympus MX50 -Microscope                        Signatone 1160 Probe Station                  Micro Epsilon confocal DT HS sensor-Laser Displacement Sensor

    

3D Printer- Pratham 3.0

   

Hioki IM3536 LCR Meter                       COMSOL Software:

  

Products developed:

  1. Micro Resonant Pressure sensor

    

  1. MEMS resonant Magnetic field sensor

                     

  1. Rigid Centre Based Pressure Sensors

   

  1. A Resonant Accelerometer With Piezoelectric Actuation And Sensing

  1. A Measurement System To Measure Thickness Of Non- Magnetic Conducting Sheet

Publications and Patents:

https://www.nitt.edu/home/academics/departments/ice/faculty/umapathy/publications/

https://www.nitt.edu/home/academics/departments/ice/faculty/guma/publications/

https://www.nitt.edu/home/academics/departments/ice/faculty/vasuki/publications/

Ph.D. Scholars:

Current Students:

Mr. V. Raja – Is currently working on Design of Spin based Piezoelectric Energy Harvesting with Storage system

Mr. Gilbert Chandra – Is currently working on MEMS in Space Applications

Mrs. S. Kumuda – Works on Design and development of low cost Non-invasive based Intraocular Pressure sensor

Ms. M.D. Vasumathi – The research work involves Modeling and Control of exoskeleton under the guidance of

Ms. Elsa Sharu Johnson –The research work involves Predictive Analysis for Diabetes Detection and Classification

Past Students:

  1. Dr. A. Ramya – 2022 , Signal Conditioning Circuits for Temperature Sensors
  2. Dr. Amit Pal  - 2022, Void Fraction Measurement in two-phase flow using a capacitive sensor
  3. Dr. Rahul Madhukar Ohol -2022, Liquid-liquid and Solid-Liquid Mixing Enhancement using Piezoelectric Actuation
  4. Dr. S. Shereen – 2020, Design, Fabrication and Testing of MEMS Magnetic Field Sensor with an Emphasis on Permanent Magnetic Materials.
  5. Dr. T. Geerthy – 2020, Non-Invasive Cuffless Blood Pressure Estimation Using Analytical and Data- Driven Models.
  6. Dr.  S. Raghavendran – 2020,Electronic interface circuits for piezoelectric energy harvesting system
  7. Dr. MS Manjunath-2020,Design, Fabrication and Testing of Rigid Center Diaphragm Based Pressure Sensors
  8. Dr. T. N. Satish – 2020, Design Development and Functional Evaluation of Sensors for Aero Gas Turbine Engine Application
  9. Dr. S. Srinivasulu Raju – 2018, Prof. M. Umapathy | Ph.D. Thesis | Design, Modelling and Development of Vibration based Piezoelectric Energy Harvesters
  10. Dr. V. Sivakami - 2020, Experimental Investigations to Enhance Airflow Measurement of Constant Voltage Anemometer In Different Flow Regions
  11. Dr. G. Palanikumar – 2018, Quality Measurement and Dosage Control of Diesel Exhaust Fluid in Selective Catalytic Reduction System
  12. Dr. R. Usharani – 2018, Design and Evaluation of piezoelectric broadband vibrational energy harvester with enhanced output
  13. Dr. V. ParthaSarathi – 2018, Design and Analysis of Fractional Order Measurement System
  14. Dr. P. Pandiyan – 2018, Design and Modelling of MEMS based Logic Devices.
  15. Dr. Sujan Yenuganti, Design, fabrication and testing of meso and micro scale resonant pressure sensors
  16. Dr. Sathiya S - 2017, Piezo Actuated Cantilever Resonators For Liquid Processing and Sensing
  17. Dr. J. Sivaraman – 2015, Investigations on the performance of a modified limb lead ECG recording system for the study of atrial P and Ta wave
  18. Dr. Senthilkumar P – 2013, Position control of shape memory alloy wire actuators using modulated adaptive controllers
  19. Dr. K. Suresh – 2012, Micro and meso scale piezo excited and sensed resonance sensor with electronics
  20. Dr. S. Dharmalingam – 2012, Determination of accumulation value for the evaporator system of fossil fuel boilers and a novel control system design for fuel switching
  21. Dr. M. Shanmugavalli – 2011, Modeling and experimental investigation of coriolis flow meter using piezoelectric sensing and actuation
  22. Dr. J. Arunshankar – 2011, Control of piezo actuated structure using multisensor data fusion
  23. Dr. L.R. Karlmarx – 2011, Modeling and design of discrete time sliding mode control for smart structures.
  24. Dr. S. Neduncheliyan – 2009, Modeling and control of piezo actuated structures with uncertainties using interval arithmetic approach.

 

Contact Information:

Ph: +91-431-2503389, +91-431-2503353 & +91-431-2503359
Email: umapathy@nitt.edu

           guma@nitt.edu

           bvas@nitt.edu