Micromachining Processes - methods, RF MEMS relays and switches. Switch parameters. Actuation mechanisms. Bistable relays and micro actuators. Dynamics of switching operation.
MEMS inductors and capacitors. Micromachined inductor. Effect of inductor layout. Modeling and design issues of planar inductor. Gap-tuning and area-tuning capacitors. Dielectric tunable capacitors.
MEMS phase shifters. Types. Limitations. Switched delay lines. Fundamentals of RF MEMS Filters. Micromachined transmission lines. Coplanar lines. Micromachined directional coupler and mixer. Micromachined antennas. Microstrip antennas – design parameters. Micromachining to improve performance. Reconfigurable antennas.
1. Vijay.K.Varadan, K.J. Vinoy, and K.A. Jose, “ RF MEMS and their Applications”, Wiley-India,2011.
1. H.J.D.Santos, “RF MEMS Circuit Design for Wireless Communications”, Artech House, 2002.
2. G.M.Rebeiz, “RF MEMS Theory, Design, and Technology”, Wiley, 2003.
Students are able to
CO1: learn the Micromachining Processes
CO2: learn the design and applications of RF MEMS inductors and capacitors.
CO3: learn about RF MEMS Filters and RF MEMS Phase Shifters.
CO4: learn about the suitability of micromachnied transmission lines for RF MEMS
CO5: learn about the Micromachnied Antennas and Reconfigurable Antennas
